Design and Analysis of a Uniform Meander RF MEMS Switch
نویسندگان
چکیده
منابع مشابه
Design and simulation of a RF MEMS shunt capacitive switch with low actuation voltage, low loss and high isolation
According to contact type, RF MEMS switches are generally classified into two categories: Capacitive switches and Metal-to-Metal ones. The capacitive switches are capable to tolerate a higher frequency range and more power than M-to-M switches. This paper presents a cantilever shunt capacitive RF MEMS switch with characteristics such as low trigger voltage, high capacitive ratio, short switchin...
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Low-loss microwave microelectromechanical systems (MEMS) shunt switches are reported that utilize highly compliant serpentine spring folded suspensions together with large area capacitive actuators to achieve low actuation voltages while maintaining sufficient off-state isolation. The RF MEMS switches were fabricated via a surface micromachining process using PI2545 Polyimide 1 as the sacrifici...
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ژورنال
عنوان ژورنال: Turkish Journal of Computer and Mathematics Education (TURCOMAT)
سال: 2021
ISSN: 1309-4653
DOI: 10.17762/turcomat.v12i5.1057